Micro Fabrication Facility Services
What We Offer
Our Micro Fabrication Facility offers a wide range of services and a flexible pricing structure. Located at the Advanced Materials Research Lab (AMRL), we are set up to accommodate projects that range from day-use to projects needing a flat-year rate.
Wafer Cleaning and Wet Etching
- Wet Benches
- Chemistries
Photolithography: Resist Coating
- Resist Coat/Bake
- Develop
Photolithography: UV Exposure
- Exposure, 1X
- Exposure, 5X
Plasma Etch
- Fluorine Etch Tool
- Chlorine Etch Tool
Dielectric Conformal Coatings
- Atomic Layer Deposition
Metal & Dielectric Deposition
- Electron Beam Evaporation
Metrology
- Optical Microscopy
- Scanning Electron Microscopy
- Stylus Profilometry
Diamond Saw Dicing
- Optical Glasses (Ex. SiO2)
- Silicon
- Sapphire
Wire Bonding
- Gold Wire
Micro Fabrication Facility Pricing
| Pricing Rates | |||||||
| Customer Type | Unit of Billing | Daily Rate | Weekly Rate | Monthly Rate | 90 Day Rate | 6 Month Rate | Flat Rate Yearly (12 mo) |
|---|---|---|---|---|---|---|---|
| Clemson Univ. Customers* | Per-User/Project | $275 | $770 | $1,705 | $3,300 | $4,840 | $7,150 |
| External Customers* | Per-User/Project | $880 | $2,464 | $5,456 | $10,560 | $15,488 | $22,880 |
* Use of all fabrication tools located at AMRL within the Micro Fabrication Facility and Lab 23, all-inclusive. Users will be responsible for providing all wafers and materials. All chemicals and materials needed for any project are approved prior to granting access to the cleanroom by the Micro Fabrication Facility manager. Precious metals used in the evaporator are an additional charge by weight used. All chemicals brought into the cleanroom are available for use by all users. Priority is given to the primary project supplying the material.
